Ultrasonic motors
are a new type of actuator. They are characterized by high torque at low
rotational speed, simple mechanical design and good controllability. They also
provide a high holding torque even if no power is applied. Compared to
electromagnetic actuators the torque per volume ratio of piezoelectric
ultrasonic motors can be higher by an order of magnitude. Recently various
types of piezoelectric ultrasonic motors have been developed for industrial
applications such as camera lens drive or as actuator in the head restraint of
automobile seats. This report describes several types of piezoelectric
ultrasonic motors. In the first part the working principle of the travelling
wave motor is explained. In the second part other types of piezoelectric
ultrasonic motors are described and classified with respect to the vibration
modes and contact mechanisms used in their design. Finally some open problems
in piezoelectric ultrasonic motor research are addressed.
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